Silicon-based tunable liquid lens system

被引：0
|
作者：
Krogmann, F [1 ]
Moench, W [1 ]
Zappe, H [1 ]
机构：
[1] Univ Freiburg, Inst Microsyst Technol, Lab Microopt, Freiburg, Germany
来源：
IEEE/LEOS OPTICAL MEMS 2005: INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND THEIR APPLICATIONS | 2005年
关键词：
micro-lens; electro-wetting; centering mechanism;
D O I：
10.1109/OMEMS.2005.1540143
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present a novel silicon-based micro-lens system actuated by electro-wetting including a lens centering mechanism and taking advantage of silicon dioxide dielectric layers and low surface roughness of standard MEMS-processes.
引用
收藏
页码：189 / 190
页数：2
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