A thermally tunable, silicon-based optical filter

被引：33
|
作者：
Hohlfeld, D [1 ]
Epmeier, M [1 ]
Zappe, H [1 ]
机构：
[1] Univ Freiburg, Lab Microopt, Inst Microsyst Technol, D-79110 Freiburg, Germany
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2003年 / 103卷 / 1-2期
关键词：
tunable optical filters; thermo-optic effect; micromachined suspension; wavelength-division multiplexing;
D O I：
10.1016/S0924-4247(02)00320-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel silicon MEMS-based concept for tunable optical filters used in wavelength-division multiplexing (WDM) systems is presented. Such a filter is essential for monitoring and reconfiguring optical networks. The device is based on a Fabry-Perot interferometer employing a silicon cavity and silicon-based dielectric Bragg mirrors and is fabricated as a free-standing membrane. Wavelength tuning is achieved through thermal modulation of the resonator's optical thickness. Measurement of optical filter performance and tunability as well as numerical simulation results of its steady-state and transient thermal behavior are presented. (C) 2003 Elsevier Science B.V. All rights reserved.
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页码：93 / 99
页数：7
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