Phased array operation of nanocrystalline porous silicon ultrasonic emitters

被引：7
|
作者：
Hirota, J [1 ]
Kiuchi, A [1 ]
Koshida, N [1 ]
机构：
[1] Tokyo Univ Agr & Technol, Fac Technol, Dept Elect & Elect Engn, Koganei, Tokyo 1848588, Japan
来源：
Physica Status Solidi C - Conferences and Critical Reviews, Vol 2, No 9 | 2005年 / 2卷 / 09期
关键词：
EMISSION;
D O I：
10.1002/pssc.200461148
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
To confirm the applicability of thermally induced ultrasound emission from nanocrystalline porous silicon (nc-PS) devices as directional sound emitter, the radiation pattern of one-dimensionally arrayed nc-PS device have been investigated. The nc-PS emitter is fabricated on a p-type Si substrate by conventional electrochemical anodization with subsequent formation of the surface electrode. It is shown that the emission pattern of arrayed devices can be controlled due to flat nature of the frequency response of the individual nc-PS devices. Furthermore we report a technique for wave control by phase-shift operation. This PS array enables the development of a directional sound emitter and intense sound source. (c) 2005 WrLEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：3298 / 3302
页数：5
相关论文
共 50 条
  • [21] STUDIES OF POROUS SILICON FIELD EMITTERS
    BOSWELL, E
    SEONG, TY
    WILSHAW, PR
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02): : 437 - 440
  • [22] Integrated phased array systems in silicon
    Hajimiri, A
    Hashemi, H
    Natarajan, A
    Guan, X
    Komijani, A
    PROCEEDINGS OF THE IEEE, 2005, 93 (09) : 1637 - 1655
  • [23] Flexible Ultrasonic Phased-Array Probe
    施克仁
    阙开良
    郭大勇
    Tsinghua Science and Technology, 2004, (05) : 574 - 577
  • [24] AN ULTRASONIC PHASED-ARRAY APPLICATOR FOR HYPERTHERMIA
    BENKESER, PJ
    OCHELTREE, K
    FOSTER, S
    FRIZZELL, LA
    CAIN, CA
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1985, 32 (01): : 101 - 101
  • [25] Phased array ultrasonic testing of gear tooth
    Wang, Liang
    Ma, Chenchen
    COGENT ENGINEERING, 2024, 11 (01):
  • [26] DEFECT IDENTIFICATION BY AN ULTRASONIC CYLINDRICAL PHASED ARRAY
    Chen, Shi-wen
    Zhang, Bi-xing
    PROCEEDINGS OF 2016 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES, AND DEVICE APPLICATIONS (SPAWDA), 2016, : 301 - 304
  • [27] Ultrasonic imaging with narrow aperture phased array
    Takizawa, N
    Ohya, A
    Akiyama, I
    ELECTRONICS AND COMMUNICATIONS IN JAPAN PART III-FUNDAMENTAL ELECTRONIC SCIENCE, 2003, 86 (02): : 72 - 81
  • [28] Ultrasonic phased array techniques for industrial applications
    Mihara T.
    Zairyo/Journal of the Society of Materials Science, Japan, 2020, 69 (08) : 569 - 574
  • [29] Method of Processing of Ultrasonic Signal of Phased Array
    Asochakov, A. S.
    Shulgina, Y. V.
    Soldatov, A. I.
    Shulgin, E. M.
    Ogorodnikov, D. N.
    2015 INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING, AUTOMATION AND CONTROL SYSTEMS (MEACS), 2015,
  • [30] Study of Ultrasonic Phased Array in Underwater Welding
    Ye, Jianxiong
    Li, Zhigang
    Peng, Xingling
    Zhou, Jinlan
    Guo, Bo
    TRANSACTIONS ON INTELLIGENT WELDING MANUFACTURING, VOL I, NO. 2 2017, 2018, 1 (02): : 175 - 182
12345