Kinetics of crack initiation and growth in organic-containing integrated structures

被引:28
|
作者
Suo, Z [1 ]
Prévost, JH
Liang, J
机构
[1] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
[2] Princeton Univ, Dept Civil & Environm Engn, Princeton, NJ 08544 USA
[3] Intel Corp, Hillsboro, OR 97124 USA
关键词
thin film; fracture; subcritical cracking; viscoelasticity; polymers;
D O I
10.1016/j.jmps.2003.09.022
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Organic materials are being introduced into solid-state devices to enhance performance, reduce cost, or add function. In such an integrated structure, creep in the organic material affects cracking in the adjacent inorganic material. This paper analyzes an idealized structure comprising, from top to bottom, an inorganic film, an organic underlayer, and a rigid substrate. The film is elastic, subject to a tensile stress, and susceptible to subcritical crack growth. The underlayer is viscoelastic and does not crack. A crack exists in the film. When the crack tip is stationary, as the underlayer creeps, the film stress relaxes in the crack wake, but intensifies around the crack tip, so that the crack may grow after a delay. When the crack tip moves, the underlayer creeps to a limited extent, and constrains the fresh crack opening. A nonequilibrium thermodynamic model evolves displacements, creep strains, and crack length simultaneously. Using the Laplace transform and the extended finite element method, we study delayed crack initiation,. steady crack growth, and transient crack growth. (C) 2003 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2169 / 2190
页数:22
相关论文
共 50 条
  • [21] Crack initiation and growth in brittle bonds
    Jensen, HM
    ENGINEERING FRACTURE MECHANICS, 2003, 70 (13) : 1611 - 1621
  • [22] A DAMAGE MODEL FOR CRACK INITIATION AND GROWTH
    GDOUTOS, EE
    ZACHAROPOULOS, DA
    THEORETICAL AND APPLIED FRACTURE MECHANICS, 1990, 14 (02) : 117 - 122
  • [23] Crack initiation in Cu-interconnect structures
    Brillet-Rouxel, H.
    Arfan, E.
    Leguillon, D.
    Dupeux, M.
    Braccini, M.
    Orain, S.
    MICROELECTRONIC ENGINEERING, 2006, 83 (11-12) : 2297 - 2302
  • [24] Mass Flow Analysis and Metal Losses by the Degradation Process of Organic-Containing WEEE Scraps
    Diaz, Fabian
    Florez, Sebastian
    Friedrich, Bernd
    CHEMIE INGENIEUR TECHNIK, 2015, 87 (11) : 1599 - 1608
  • [25] On the kinetics of crack growth in glass
    Pukh, V. P.
    Baikova, L. G.
    Kireenko, M. F.
    Tikhonova, L. V.
    GLASS PHYSICS AND CHEMISTRY, 2009, 35 (06) : 560 - 566
  • [26] On the kinetics of crack growth in glass
    V. P. Pukh
    L. G. Baikova
    M. F. Kireenko
    L. V. Tikhonova
    Glass Physics and Chemistry, 2009, 35 : 560 - 566
  • [27] ON THE RELATIONSHIP BETWEEN CRACK-GROWTH AND CRACK INITIATION TOUGHNESS
    RITCHIE, RO
    THOMPSON, AW
    JOURNAL OF METALS, 1984, 36 (07): : 63 - 63
  • [28] A continuum mechanics approach for crack initiation and crack growth predictions
    Jiang, Y.
    MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK, 2006, 37 (09) : 738 - 746
  • [29] Distinct diurnal chemical compositions and formation processes of individual organic-containing particles in Beijing winter*
    Ma, Tao
    Furutani, Hiroshi
    Duan, Fengkui
    Kimoto, Takashi
    Ma, Yongliang
    Zhu, Lidan
    Huang, Tao
    Toyoda, Michisato
    He, Kebin
    ENVIRONMENTAL POLLUTION, 2023, 318
  • [30] THE INITIATION OF CRACK-GROWTH IN LINEAR POLYETHYLENE
    BHATTACHARYA, SK
    BROWN, N
    JOURNAL OF MATERIALS SCIENCE, 1985, 20 (08) : 2767 - 2775