Cross-scale and cross-precision structures/systems fabricated by high-efficiency and low-cost hybrid 3D printing technology

Three-dimensional (3D) printing is widely used in many fields such as micro-optics, microbiology, and micro -fluidics. However, using existing technologies is a challenge to efficiently fabricate high-quality 3D structures with cross-scale and cross-precision. In this paper, we propose a low-cost hybrid processing technology that combines two-photon polymerization (TPP) and DMD micro stereolithography (DMDMSL) (TPP-DMDMSL). This low-cost hybrid processing technology is a two-part alignment achieved by combining marker positioning and image processing, and then by coordinating the transformation of processing data. Using the same mark as a bridge, the two independent technologies are linked to realize hybrid processing. The high synergetic combi-nation of the two technologies is realized by using the mask as the benchmark and combining it with the flexible real-time transformation of processing data. The horizontal and vertical alignment accuracy is 2 mu m and 3 mu m, respectively. TPP-DMDMSL unites the high precision of TPP with the high efficiency of DMDMSL. Taking the aspheric lens as an example (radius = 163 mu m, height = 33 mu m), TPP-DMDMSL reduces the time from 4 h to 1 h. The maximum surface error is 0.22 mu m, which does not affect the image quality according to the Rayleigh cri-terion. TPP-DMDMSL manufactures different types of structures. These results prove that TPP-DMDMSL can print multiple types of 3D structures across scales and precision, which is challenging or time-consuming with existing technologies. TPP-DMDMSL will likely be extended to more micro and nano fields based on the original general technology. TPP-DMDMSL provides strong basic techniques and ideas for integrated hybrid processing systems in the future.