Electrical conduction in undoped ultrananocrystalline diamond thin films and its dependence on chemical composition and crystalline structure

被引:33
|
作者
Correa, Eric J. [1 ]
Wu, Yan [1 ]
Wen, Jian-Guo [2 ]
Chandrasekharan, Ramesh [1 ]
Shannon, Mark A. [1 ]
机构
[1] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Ctr Microanal Mat, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.2816214
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electrical conduction behavior of undoped ultrananocrystalline diamond (UNCD) and its dependence on deposition temperature and chemical structure are presented. UNCD films were grown using a microwave plasma-enhanced chemical vapor deposition technique at deposition temperatures of 400 degrees C and 800 degrees C. The chemical structure of the UNCD films is characterized with several tools including: Elastic recoil detection analysis, Fourier transform infrared spectroscopy, electron energy loss spectroscopy, Raman spectroscopy, and environmental scanning electron microscope. The results show a higher content of sp(2)-bonded carbon for the 800 degrees C deposition samples (similar to 65%) in comparison with the 400 degrees C samples (similar to 38%). In both kinds of films, the hydrocarbon bonds have the saturated sp(3) structures, while there is lower hydrogen content in the 800 degrees C samples (similar to 8%) than in the 400 degrees C samples (similar to 10%). For conduction properties, experiments are conducted using a probe station and conductive-atomic force microscopy. Experimental data show that the samples deposited at 800 degrees C are several orders of magnitude more conductive than the 400 degrees C samples. The conduction occurs primarily along the grain boundary for both types of samples. The conductivity of both types of films also shows field dependent nonlinear behavior. Both the Poole-Frenkel models and single and overlapping Coulombic potential models show that the conduction is directly correlated with the sp(2) bond carbon density, and the role of the hydrocarbon bonds in the conduction path is formed by the network of the sp(2) bonded carbon. (c) 2007 American Institute of Physics.
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页数:10
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