Integrated infrared detectors based on (Ba0.65Sr0.35)TiO3 thin films

被引：0
|
作者：
Wu, Ch. G. [1 ]
Zhang, W. L. [1 ]
Li, Y. R. [1 ]
Liu, X. Zh. [1 ]
Zhu, J. [1 ]
Tao, B. W. [1 ]
机构：
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
来源：
INTEGRATED FERROELECTRICS | 2007年 / 95卷
关键词：
D O I：
10.1080/10584580701756029
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The integrated single element infrared detectors were developed for high-loading smart munition application using (Ba0.65Sr0.35)TiO3 (BST) pyroelectric films and SiO2 thermal insulating layer. (Ba,Sr)RuO3 (BSR) seeding-layer was deposited on the Pt/Ti/SiO2/Si to induce BST films c-axis preferred orientation growth. The capacitance dependant with temperature of BST films were measured at the temperature ranging from 230K to 340K, releasing that the temperature coefficient of capacitance was 1.6%/K. The pyroelectric coefficient of BST films was 7.45 x 10(-7) C/K Cm-2 measured by dynamic method. Infrared response evaluation of the fabricated sensor has been carried out with D* of 6.34 x 10(7) cm Hz(1/2)/W indicating that the integrated infrared detectors have potential application as gun-launched smart munition seeker.
引用
收藏
页码：26 / 34
页数：9
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