Optical Angle Sensor Technology Based on the Optical Frequency Comb Laser

被引:22
|
作者
Shimizu, Yuki [1 ]
Matsukuma, Hiraku [1 ]
Gao, Wei [1 ]
机构
[1] Tohoku Univ, Dept Finemech, Aoba Ku, 6-6-01 Aramaki Aza Aoba, Sendai, Miyagi 9808579, Japan
来源
APPLIED SCIENCES-BASEL | 2020年 / 10卷 / 11期
基金
日本学术振兴会;
关键词
optical angle sensor; mode-locked femtosecond laser; optical frequency comb; laser autocollimation; diffraction grating; absolute angle measurement; nonlinear optics; second harmonic generation; ABSOLUTE DISTANCE; RING LASER; PROFILE MEASUREMENT; ACCURACY; SURFACE; AUTOCOLLIMATOR; THICKNESS; SYSTEM; INTERFEROMETER; METROLOGY;
D O I
10.3390/app10114047
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A mode-locked femtosecond laser, which is often referred to as the optical frequency comb, has increasing applications in various industrial fields, including production engineering, in the last two decades. Many efforts have been made so far to apply the mode-locked femtosecond laser to the absolute distance measurement. In recent years, a mode-locked femtosecond laser has increasing application in angle measurement, where the unique characteristics of the mode-locked femtosecond laser such as the stable optical frequencies, equally-spaced modes in frequency domain, and the ultra-short pulse trains with a high peak power are utilized to achieve precision and stable angle measurement. In this review article, some of the optical angle sensor techniques based on the mode-locked femtosecond laser are introduced. First, the angle scale comb, which can be generated by combining the dispersive characteristic of a scale grating and the discretized modes in a mode-locked femtosecond laser, is introduced. Some of the mode-locked femtosecond laser autocollimators, which have been realized by combining the concept of the angle scale comb with the laser autocollimation, are also explained. Angle measurement techniques based on the absolute distance measurements, lateral chromatic aberration, and second harmonic generation (SHG) are also introduced.
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页数:22
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