Perovskite thin films for high-frequency capacitor applications

被引：152
|
作者：
Dimos, D
Mueller, CH
机构：
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
[2] Superconducting Core Technol Inc, Golden, CO 80401 USA
来源：
ANNUAL REVIEW OF MATERIALS SCIENCE | 1998年 / 28卷
关键词：
Pb(Zr; Ti)O-3; (Ba; Sr)TiO3; decoupling capacitors; microwave capacitors;
D O I：
10.1146/annurev.matsci.28.1.397
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Perovskite, ferroelectric and paraelectric, thin films exhibit outstanding dielectric properties, even at high frequencies (>1 GHz). This feature makes films such as (Ba,Sr)TiO3 and Pb(Zr,Ti)O-3 ideally suited for a wide range of capacitor applications, particularly decoupling capacitors and tunable microwave capacitors; the latter application has been fueled by the recent explosion in wireless communications. The successful implementation of these materials as high-frequency dielectrics requires a detailed understanding of both their processing and materials properties.
引用
收藏
页码：397 / 419
页数：23
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