A wireless surface acoustic wave temperature sensor using langasite as substrate material for high-temperature applications

被引：35
|
作者：
Wang, SQ [1 ]
Harada, J [1 ]
Uda, S [1 ]
机构：
[1] Mitsubishi Mat Corp, Elect Device R&D Ctr, Chichibu, Saitama 3688503, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2003年 / 42卷 / 9B期
关键词：
sensor; wireless; SAW; langasite;
D O I：
10.1143/JJAP.42.6124
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A wireless surface acoustic wave (SAW) temperature sensor was produced using langsite single crystal as a piezoelectric substrate. The properties of both solid-electrode and split-electrode interdigital transducers (IDTs) were studied by fitting the admittance curves. A miniature antenna was used and the impedance matching technique between the antenna and the IDT was investigated. The temperature characteristic in the temperature range of 20-700degreesC was measured. The results showed that both the SAW chip and the antenna functioned in this temperature range.
引用
收藏
页码：6124 / 6127
页数：4
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