Parallel plate interferometer with a reflecting mirror for measuring angular displacement

被引：2
|
作者：
Zheng, Defeng
Wangi, Xiangzhao [1 ]
Sasaki, Osami
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Informat Opt Lab, Shanghai 201800, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
[3] Niigata Univ, Fac Engn, Niigata 9502181, Japan
来源：
OPTICAL REVIEW | 2007年 / 14卷 / 05期
关键词：
angular displacement; interference measurement; plane-parallel plate; laser diode; phase measurement;
D O I：
10.1007/s10043-007-0314-8
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A parallel plate interferometer with a reflecting mirror for measuring angular displacement is proposed. A deflection angle of a beam caused by an angular displacement is amplified by use of a reflecting mirror to increase the optical path difference (OPD) in the plane-parallel plate, which provides high sensitivity of the phase measurement. Detection of light transmitted through the plane-parallel plate with a position sensitive detector (PSD) enables high accurate measurement of the initial angle of incidence to the plane-parallel plate with insensitivity to stray light. The improved parallel plate interferometer achieves a measurement repeatability of 10(-8) rad. (C) 2007 The Optical Society of Japan.
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页码：314 / 318
页数：5
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