Thin film thermo-mechanical sensors embedded in metallic structures

被引：1
|
作者：
Golnas, T [1 ]
Prinz, FB
机构：
[1] Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
[2] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA
来源：
TRENDS AND NEW APPLICATIONS OF THIN FILMS | 1998年 / 287-2卷
关键词：
thin film sensors; embedded sensors; reactive sputtering; layered manufacturing;
D O I：
10.4028/www.scientific.net/MSF.287-288.201
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The embedding of thin film thermo-mechanical sensors in structures such as tools is of great interest to the manufacturing industry. We present the first results of our experiments to produce thin film thermocouples and strain sensors enclosed in metallic macroscopic structures using a layered manufacturing technique (Shape Deposition Manufacturing). The issues to be addressed are the electrical insulation of the sensors, the thermo-mechanical integrity of the resulting thin film multilayer and its compatibility with the high temperature process of embedding.
引用
收藏
页码：201 / 204
页数：4
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