Characterization of Thermo-mechanical Properties of Carbon-based Low-dimensional Material/Metallic Thin-film Composites from NEMS Structures.

被引:0
|
作者
Cho, Myung Rae [1 ]
Kim, Young Duck [1 ]
Lee, Byung Yang [1 ]
Hong, Seunghun [1 ]
Park, Yun Daniel [1 ]
机构
[1] Seoul Natl Univ, Dept Phys & Astron, Seoul 151747, South Korea
来源
CHEMICAL SENSORS 9 -AND- MEMS/NEMS 9 | 2010年 / 33卷 / 08期
关键词
D O I
10.1149/1.3484130
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
We report on the direct thermal conductivity measurement of nanoscale nanolaminate material system from metallic thin-film (Al) and carbon-based low-dimensional material (swCNT). Such accurate measurement was made possible by realizing submicron measurement platform using micromaching techniques. Furthermore, by measuring the resonant response of such nanomechanical structures, we are able to deduce their thermalelastic properties. We find that addition of swCNTs to Al thin-film greatly suppresses the overall coefficient of thermal expansion. On the other hand, addition of swCNTs has marginal effects on the resulting thermal conductivities.
引用
收藏
页码:263 / 268
页数:6
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