Floating electrode microelectromechanical system capacitive switches: A different actuation mechanism

被引：18
|
作者：
Papaioannou, G. [1 ]
Giacomozzi, F. [2 ]
Papandreou, E. [1 ]
Margesin, B. [2 ]
机构：
[1] Univ Athens, Solid State Phys Sect, Dept Phys, Athens 15784, Greece
[2] Fdn B Kessler FBK, I-38123 Povo, Italy
来源：
APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 07期
关键词：
RF MEMS SWITCHES; RELIABILITY; MODEL;
D O I：
10.1063/1.3624830
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The paper investigates the actuation mechanism in floating electrode microelectromechanical system capacitive switches. It is demonstrated that in the pull-in state, the device operation turns from voltage to current controlled actuation. The current arises from Poole-Frenkel mechanism in the dielectric film and Fowler-Nordheim in the bridge-floating electrode air gap. The pull-out voltage seems to arise from the abrupt decrease of Fowler-Nordheim electric field intensity. This mechanism seems to be responsible for the very small difference with respect to the pull-in voltage. (C) 2011 American Institute of Physics. [doi:10.1063/1.3624830]
引用
收藏
页数：3
相关论文
共 50 条
  • [1] Electrical Characteristics of Floating Electrode MEMS Capacitive Switches
    Michalas, L.
    Koutsoureli, M.
    Papandreou, E.
    Papaioannou, G. J.
    Giacomozzi, F.
    Colpo, S.
    Margesin, B.
    2012 7TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2012, : 36 - 39
  • [2] Dielectric charging in capacitive microelectromechanical system switches with silicon nitride
    Koutsoureli, M.
    Tavassolian, N.
    Papaioannou, G.
    Papapolymerou, J.
    APPLIED PHYSICS LETTERS, 2011, 98 (09)
  • [3] Measurements of charging in capacitive microelectromechanical switches
    Reid, JR
    Webster, RT
    ELECTRONICS LETTERS, 2002, 38 (24) : 1544 - 1545
  • [4] Dielectric charging effects in floating electrode MEMS capacitive switches
    Michalas, L.
    Koutsoureli, M.
    Papandreou, E.
    Giacomozzi, F.
    Papaioannou, G.
    MICROELECTRONICS RELIABILITY, 2015, 55 (9-10) : 1891 - 1895
  • [5] Determination of long time discharge current in microelectromechanical system capacitive switches
    Koutsoureli, M.
    Papaioannou, G.
    APPLIED PHYSICS LETTERS, 2011, 99 (10)
  • [6] Dielectric Less and Dimple Less MEMS Capacitive Switches: The Actuation Mechanism
    Michalas, L.
    Koutsoureli, M.
    Papaioannou, G. J.
    Stavrinidis, G.
    Konstantinidis, G.
    2012 7TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2012, : 445 - 448
  • [7] Dielectric charge measurements in capacitive microelectromechanical switches
    Molinero, D.
    Comulada, R.
    Castaner, L.
    APPLIED PHYSICS LETTERS, 2006, 89 (10)
  • [8] RF actuation of capacitive MEMS switches
    Reid, JR
    Starman, LA
    Webster, RT
    2003 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2003, : 1919 - 1922
  • [9] Direct measurements and numerical simulations of gas charging in microelectromechanical system capacitive switches
    Venkattraman, A.
    Garg, A.
    Peroulis, D.
    Alexeenko, A. A.
    APPLIED PHYSICS LETTERS, 2012, 100 (08)
  • [10] Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches
    Olszewski, Z.
    Houlihan, R.
    Ryan, C.
    O'Mahony, C.
    Duane, R.
    APPLIED PHYSICS LETTERS, 2012, 100 (23)
12345