共 50 条
- [21] Enabling nanoimprint simulator for quality verification: process-design co-optimization toward high-volume manufacturing [J]. JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 2022, 21 (01):
- [25] THE DESIGN, CHARACTERIZATION, AND IMPLEMENTATION OF A ONE MICRON LITHOGRAPHY PROCESS IN A HIGH-VOLUME MANUFACTURING LINE [J]. OPTICAL/LASER MICROLITHOGRAPHY II, 1989, 1088 : 136 - 152
- [27] HIGH-SPEED DELIVERIES IMPROVE HIGH-VOLUME PRODUCTION [J]. INDUSTRIAL ENGINEERING, 1978, 10 (11): : 42 - 44
- [29] High-Volume Manufacturing Device Overlay Process Control [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXI, 2017, 10145