Characteristic of ZnxCd1-xO alloy film grown by RF magnetron co-sputtering system.

被引：0
|
作者：
Yu, J. H. [1 ]
Kim, J. H. [1 ]
Jeong, T. S. [2 ]
Youn, C. J. [2 ]
机构：
[1] Jeonbuk Natl Univ, Dept Semicond & Chem Engn, Jeonju, South Korea
[2] Semicond Phys Res Ctr, Jeonju, South Korea
来源：
PHYSICS OF SEMICONDUCTORS: 30TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF SEMICONDUCTORS | 2011年 / 1399卷
基金：
新加坡国家研究基金会;
关键词：
ZnCdO; RF sputter; TRANSPARENT;
D O I：
10.1063/1.3666280
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
ZnO based oxide system ZnxCd1-xO alloy of various compositions has been successfully grown by the RF co-sputtering system. ZnxCd1-xO alloy films, which have x= 0, 0.01, 0.02, 0.05, 0.08, 0.13 and 1, were grown on Al2O3 substrate. From the XRD measurement, the ZnxCd1-xO films observed to be hexagonal structure at the range of 0 <= x <= 0.08. At x=0.13, the mixed crystalline of the hexagonal-cubic structure was measured. Also, the optical bandgap energy has been modulated from 3.3eV to 2.4eV. After post-Annealing, the crystallinity of the ZnxCd1-xO films improved. Furthermore, this process suggests that it is very important to maintain the optical performance for LED and LD devices.
引用
收藏
页数：2
相关论文
共 50 条
  • [1] Synthesis of a BexZn1-xO Crystalline Film by Using RF Magnetron Co-Sputtering
    Park, D. S.
    Kim, J. H.
    Yu, J. H.
    Jeong, T. S.
    Youn, C. J.
    Hong, K. J.
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2010, 56 (01) : 70 - 74
  • [2] Effect of Annealing on the Properties of ZnxCd1-xS Thin Film Growth by RF Magnetron Co-sputtering
    Hossain, M. S.
    Islam, M. A.
    Aliyu, M. M.
    Chelvanathan, P.
    Razykov, T.
    Sopian, K.
    Amin, N.
    [J]. PV ASIA PACIFIC CONFERENCE 2012, 2013, 33 : 214 - 222
  • [3] Bandgap tunability and local structure of MgxZn1-xO (0 ≤ x ≤ 1) thin films grown by RF magnetron co-sputtering
    Chetia, S. K.
    Rajput, P.
    Ajimsha, R. S.
    Singh, R.
    Das, A. K.
    Kumar, R.
    Padhi, P. S.
    Sinha, A. K.
    Jha, S. N.
    Sharma, T. K.
    Misra, P.
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2022, 128 (08):
  • [4] Bandgap tunability and local structure of MgxZn1–xO (0 ≤ x ≤ 1) thin films grown by RF magnetron co-sputtering
    S. K. Chetia
    P. Rajput
    R. S. Ajimsha
    R. Singh
    A. K. Das
    R. Kumar
    P. S. Padhi
    A. K. Sinha
    S. N. Jha
    T. K. Sharma
    P. Misra
    [J]. Applied Physics A, 2022, 128
  • [5] Properties of amorphous SiAlON thin films grown by RF magnetron co-sputtering
    Bernhardt, G. P.
    Krassikoff, J. I.
    Sturtevant, B. T.
    Lad, R. J.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2014, 258 : 1191 - 1195
  • [6] Oscillating composition of Fe-W alloy thin films grown by magnetron co-sputtering
    Plantin, P.
    Thomann, A.-L.
    Brault, P.
    Renault, P.-O.
    Laaroussi, S.
    Goudeau, P.
    Boubeker, B.
    Sauvage, T.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2007, 201 (16-17): : 7115 - 7121
  • [7] SiC formation for a solar cell passivation layer using an RF magnetron co-sputtering system
    Yeun-Ho Joung
    Hyun Il Kang
    Jung Hyun Kim
    Hae-Seok Lee
    Jaehyung Lee
    Won Seok Choi
    [J]. Nanoscale Research Letters, 7
  • [8] Tailoring of TiO2 film microstructure by pulsed-DC and RF magnetron co-sputtering
    Lelis, Martynas
    Tuckute, Simona
    Varnagiris, Sarunas
    Urbonavicius, Marius
    Laukaitis, Giedrius
    Bockute, Kristina
    [J]. SURFACE & COATINGS TECHNOLOGY, 2019, 377
  • [9] SiC formation for a solar cell passivation layer using an RF magnetron co-sputtering system
    Joung, Yeun-Ho
    Kang, Hyun Il
    Kim, Jung Hyun
    Lee, Hae-Seok
    Lee, Jaehyung
    Choi, Won Seok
    [J]. NANOSCALE RESEARCH LETTERS, 2012, 7
  • [10] Magnetoresistance of La1-xSrxMnO3 films deposited by RF magnetron co-sputtering
    Cho, YS
    Hwang-Bo, JS
    Kim, YH
    Park, SI
    Lee, SW
    Kim, CS
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2001, 226 : 754 - 756
12345