A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module

被引：53
|
作者：
Kuang, CF [1 ]
Feng, QB [1 ]
Zhang, B [1 ]
Liu, B [1 ]
Chen, SQ [1 ]
Zhang, ZF [1 ]
机构：
[1] Beijing Jiaotong Univ, Sch Sci, Beijing 100044, Peoples R China
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 125卷 / 01期
关键词：
optical measurement; four-degree-of-freedom; straightness error; angular error; linear stage;
D O I：
10.1016/j.sna.2005.05.022
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A simple and novel method for measuring four-degree-of-freedom geometric errors of a linear stage was put forward. A single-mode fiber-coupled laser module was used. Only a cube corner retro-reflector and a beam splitter were adopted in the moving target in order to sense the straightness errors and angular errors, respectively. In this way, the horizontal and vertical straightness errors as well as yaw and pitch errors can be measured simultaneously. Theoretic error separation has been analyzed in detail and the straightness-compensated method was given. The system based on the above method was developed. In comparison with an API five-dimensional laser measurement system, the accuracy of the measuring straightness error is about +/- 2.5 mu m within the measuring range of +/- 500 mu m, and the angular errors are about +/- 3 arcsec within the range of +/- 400 aresec. In addition, there is no cable connection in the moving target, which is a great convenience for the workshop measurements. (c) 2005 Elsevier B.V.. All rights reserved.
引用
收藏
页码：100 / 108
页数：9
相关论文
共 50 条
  • [21] High-Brightness, Fiber-Coupled Diode Laser System for Fiber Laser Pumping
    Roh, S. D.
    Grasso, D. M.
    Ostrom, N. P.
    Faircloth, B. O.
    2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5, 2007, : 1417 - 1418
  • [22] High peak power ultrafast Yb: CaF2 oscillator pumped by a single-mode fiber-coupled laser diode
    Kowalczyk, Maciej
    Major, Arkady
    Sotor, Jaroslaw
    OPTICS EXPRESS, 2017, 25 (21): : 26289 - 26295
  • [23] Single-mode broadband red fiber laser
    Byalkovskiy, O. A.
    Tyrtyshnyy, V. A.
    Golubyatnikov, E. S.
    2016 INTERNATIONAL CONFERENCE LASER OPTICS (LO), 2016,
  • [24] LASER TO SINGLE-MODE FIBER COUPLING IN THE LABORATORY
    LADANY, I
    APPLIED OPTICS, 1993, 32 (18): : 3233 - 3236
  • [25] A NEW CONFOCAL COMBINATION LENS METHOD FOR A LASER-DIODE MODULE USING A SINGLE-MODE FIBER
    KAWANO, K
    SARUWATARI, M
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 1985, 3 (04) : 739 - 745
  • [26] Fiber laser coherent array for power scaling of single-mode fiber laser
    Shirakawa, A
    Matsuo, K
    Ueda, K
    FIFTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2004, 5662 : 482 - 487
  • [27] A fiber-coupled laser hygrometer for airborne total water measurement
    Dorsi, S. W.
    Kalnajs, L. E.
    Toohey, D. W.
    Avallone, L. M.
    ATMOSPHERIC MEASUREMENT TECHNIQUES, 2014, 7 (01) : 215 - 223
  • [28] SPECTRAL PROPERTIES OF A SEMICONDUCTOR-LASER COUPLED TO A SINGLE-MODE FIBER RESONATOR
    FAVRE, F
    LEGUEN, D
    IEEE JOURNAL OF QUANTUM ELECTRONICS, 1985, 21 (12) : 1937 - 1946
  • [29] 633 nm single-mode laser-diode module with PM fiber output
    Blume, G.
    Jedrzejczyk, D.
    Pohl, J.
    Feise, D.
    Sahm, A.
    Eppich, B.
    Noelleke, C.
    Leisching, P.
    Paschke, K.
    OPTICAL COMPONENTS AND MATERIALS XIV, 2017, 10100
  • [30] Novel single-mode fiber coupled broadband seed source for pulsed fiber laser systems
    Zibik, E. A.
    Sverdlov, B.
    Mohrdiek, S.
    Troger, J.
    Pawlik, S.
    Pfeiffer, H. -U.
    Lichtenstein, N.
    NOVEL IN-PLANE SEMICONDUCTOR LASERS IX, 2010, 7616
12345