BROADBAND ENERGY HARVESTING USING A NONLINEAR 2DOF MEMS ELECTRET POWER GENERATOR

被引：0

作者：

Tao, K. ^{[1
]}

Wu, J. ^{[1
]}

Tang, L. H. ^{[2
]}

Wang, N. ^{[1
]}

Lye, S. W. ^{[1
]}

Miao, J. M. ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore, Singapore

[2] Univ Auckland, Dept Mech Engn, Auckland 1, New Zealand

来源：

2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2016年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the modeling and experimental results of a novel nonlinear 2-degree-of-freedom (2DOF) MEMS electret power generator for broadband energy harvesting. The proposed 2DOF resonant system that comprises a primary and an accessory mass is constructed on a silicon wafer by double-side DRIE process. Two close resonances with frequency ratio of only 1.24 (590 Hz and 731 Hz) and comparable magnitudes are achieved for the first time for a 2DOF MEMS device. With further increasing the excitation, hardening nonlinearity induced by end-stop effect is engaged, resulting in resonant frequency drift upwards and further bandwidth convergence. The outcome of the work offers a promising wideband approach by combined advantages of both multi-modal and nonlinear mechanisms.

引用

页码：1236 / 1239

页数：4

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