A SANDWICH-STRUCTURED MEMS ELECTRET POWER GENERATOR FOR MULTI-DIRECTIONAL VIBRATION ENERGY HARVESTING

被引：0
|
作者：
Tao, K. [1 ]
Lye, S. W. [1 ]
Wang, N. [1 ]
Hu, X. [2 ]
Miao, J. M. [1 ]
机构：
[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore, Singapore
[2] Nanyang Technol Univ, Sch Mat Sci & Engn, Singapore, Singapore
来源：
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年
关键词：
Energy harvesting; Power generator; Electret-based; Sandwich; MEMS; Multi-directional;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the design, modeling and characterization of a compact MEMS electret power generator for multi-directional vibration energy harvesting. The device is built on a symmetrical square-shape resonator that could harvest kinetic energy from multiple directions by using two orthogonal vibration degrees of freedom. Sandwich structure is adopted not only to enhance the output performance, but also to reduce both vertical pull-in and horizontal electrostatic damping force with two separate 180 degrees out-of-phase capacitive circuit. The generator can be a potential candidate towards a practical multi-directional energy harvesting device for low-level ambient vibrational energy harvesting.
引用
收藏
页码：51 / 54
页数：4
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