Nucleation of Ge quantum dots on the C-alloyed Si(001) surface

被引:26
|
作者
Leifeld, O
Beyer, A
Müller, E
Grützmacher, D [1 ]
Kern, K
机构
[1] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
[2] Ecole Polytech Fed Lausanne, Inst Phys Expt, CH-1015 Lausanne, Switzerland
[3] Max Planck Inst Festkorperforsch, D-70596 Stuttgart, Germany
关键词
Ge quantum dots; molecular beam epitaxy; in situ scanning tunneling microscopy;
D O I
10.1016/S0040-6090(00)01497-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Carbon pre-deposition onto the bare Si(001) surface has been shown to alter the (2 x 1) surface structure by formation of c(4 x 4) reconstructed domains containing a high C-concentration. Here we studied by ultra-high vacuum scanning tunneling microscopy the effect of this restructured surface on the initial stages of Ge nucleation by molecular beam epitaxy. Ge is found to form three-dimensional (3D) islands already at sub-munolayer coverage, resulting in a Volmer-Weber growth mode. Strain effects repel Ge adatoms from the C-rich domains, leading to enhanced Ge island formation on the C-free surface regions in between the c(4 x 4) areas. At a low growth temperature of 350 degreesC, very small three-dimensional islands (3-5 nm in diameter, bright 3-4 ML) with a density of nearly 1 x 10(12) cm - are obtained for only 0.5 ML of Ce. At higher substrate temperatures of approximately 500 degreesC this three-dimensional growth mode is less pronounced, but still evident. The initially nucleated three-dimensional islands define the positions of the larger quantum dots at higher Gr coverage, that exhibit enhanced photoluminescence (PL) properties. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:176 / 179
页数:4
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