Monolithically integrated waveguide-coupled silica microtoroids

被引：0
|
作者：
Richter, J. [1 ]
Nezhad, M. P. [1 ]
Witzens, J. [1 ]
机构：
[1] Rhein Westfal TH Aachen, Inst Integrated Photon, D-52074 Aachen, Germany
来源：
2015 OPTO-ELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC) | 2015年
关键词：
Photonic Integrated Circuits; Silicon Photonics; Nanophotonics; High-Q Resonators;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.
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页数：3
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