MEMS-based miniature optical pickup

被引：8
|
作者：
Chiu, Y [1 ]
Chen, CH
Chiou, JC
Fang, WL
Shieh, HPD
机构：
[1] Natl Chiao Tung Univ, Dept Elect & Control Engn, Hsinchu 300, Taiwan
[2] Natl Taiwan Univ Sci & Technol, Dept Elect Engn, Taipei, Taiwan
[3] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 300, Taiwan
[4] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 300, Taiwan
来源：
IEEE TRANSACTIONS ON MAGNETICS | 2005年 / 41卷 / 02期
关键词：
diffractive optical element; microelectromechanical system (MEMS); micromirror; optical pickup;
D O I：
10.1109/TMAG.2004.842077
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The technology challenges for miniature optical pickups include high-numerical-aperture objective lens design, servo actuator functions and performance, and component assembly tolerance. In this paper, a microelectromechanical systems (MEMS)-based miniature optical pickup is proposed for DVD and blue disk systems. A high-order diffractive objective lens with a continuous surface relief is designed. Focus, tilt, and tracking servos are implanted with MEMS micro actuators. Preliminary design and test results are presented.
引用
收藏
页码：967 / 970
页数：4
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