Fabrication of a terahertz quantum-cascade laser with a double metal waveguide based on multilayer GaAs/AlGaAs heterostructures

被引：17

作者：

Khabibullin, R. A. ^{[1
]}

Shchavruk, N. V. ^{[1
]}

Pavlov, A. Yu. ^{[1
]}

Ponomarev, D. S. ^{[1
]}

Tomosh, K. N. ^{[1
]}

Galiev, R. R. ^{[1
]}

Maltsev, P. P. ^{[1
]}

Zhukov, A. E. ^{[2
,3
]}

Cirlin, G. E. ^{[2
,3
]}

Zubov, F. I. ^{[2
]}

Alferov, Zh. I. ^{[2
,3
]}

机构：

[1] Russian Acad Sci, Inst Ultrahigh Frequency Semicond Elect, Nagornyi Pr 7,Str 5, Moscow 117105, Russia

[2] St Petersburg Acad Univ, Nanotechnol Res & Educ Ctr, Russian Acad Sci, Ul Khlopina 8-3, St Petersburg 194021, Russia

[3] Russian Acad Sci, St Petersburg Sci Ctr, Univ Skaya Nab 5, St Petersburg 199034, Russia

来源：

SEMICONDUCTORS | 2016年 / 50卷 / 10期

基金：

俄罗斯基础研究基金会;

关键词：

FREQUENCY; THZ;

D O I：

10.1134/S1063782616100134

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The Postgrowth processing of GaAs/AlGaAs multilayer heterostructures for terahertz quantumcascade lasers (QCLs) are studied. This procedure includes the thermocompression bonding of In-Au multilayer heterostructures with a doped n (+)-GaAs substrate, mechanical grinding, and selective wet etching of the substrate, and dry etching of QCL ridge mesastripes through a Ti/Au metallization mask 50 and 100 mu m wide. Reactive-ion-etching modes with an inductively coupled plasma source in a BCl3/Ar gas mixture are selected to obtain vertical walls of the QCL ridge mesastripes with minimum Ti/Au mask sputtering.

引用

页码：1377 / 1382

页数：6

共 50 条

[31] Self-aligned coupled cavity GaAs/AlGaAs midinfrared quantum-cascade laser
Hvozdara, L
Lugstein, A
Gianordoli, S
Schrenk, W
Strasser, G
Unterrainer, K
Bertagnolli, E
Gornik, E
[J]. APPLIED PHYSICS LETTERS, 2000, 77 (08) : 1077 - 1079
[32] Spectral behavior of a terahertz quantum-cascade laser
Hensley, J. M.
Montoya, Juan
Allen, M. G.
Xu, J.
Mahler, L.
Tredicucci, A.
Beere, H. E.
Ritchie, D. A.
[J]. OPTICS EXPRESS, 2009, 17 (22): : 20476 - 20483
[33] Spectral Terahertz Imaging with a Quantum-Cascade Laser
Hagelschuer, T.
Rothbart, N.
Richter, H.
Wienold, M.
Huebers, H. -W.
[J]. 2016 41ST INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ), 2016,
[34] Spectroscopy in the gas phase with GaAs/AlGaAs quantum-cascade lasers
Hvozdara, L
Gianordoli, S
Strasser, G
Schrenk, W
Unterrainer, K
Gornik, E
Murthy, CSSS
Kraft, M
Pustogow, V
Mizaikoff, B
Inberg, A
Croitoru, N
[J]. APPLIED OPTICS, 2000, 39 (36) : 6926 - 6930
[35] Terahertz electroluminescence originating from spatially indirect intersubband transitions in a GaAs/AlGaAs quantum-cascade structure
Glinskii, GF
Andrianov, AV
Sreseli, OM
Zinov'ev, NN
[J]. SEMICONDUCTORS, 2005, 39 (10) : 1182 - 1187
[36] Terahertz electroluminescence originating from spatially indirect intersubband transitions in a GaAs/AlGaAs quantum-cascade structure
G. F. Glinskii
A. V. Andrianov
O. M. Sreseli
N. N. Zinov’ev
[J]. Semiconductors, 2005, 39 : 1182 - 1187
[37] Material growth and device fabrication of terahertz quantum-cascade laser based on bound-to-continuum structure
Yin Rong
Wan Wen-Jian
Zhang Zhen-Zhen
Tan Zhi-Yong
Cao Jun-Cheng
[J]. CHINESE PHYSICS B, 2014, 23 (10)
[38] Material growth and device fabrication of terahertz quantum-cascade laser based on bound-to-continuum structure
尹嵘
万文坚
张真真
谭智勇
曹俊诚
[J]. Chinese Physics B, 2014, 23 (10) : 155 - 158
[39] Low-threshold terahertz quantum-cascade lasers based on GaAs/Al0.25Ga0.75As heterostructures
Wienold, M.
Schrottke, L.
Giehler, M.
Hey, R.
Anders, W.
Grahn, H. T.
[J]. APPLIED PHYSICS LETTERS, 2010, 97 (07)
[40] Fast Reflective Scanning Imaging Based on Terahertz Quantum-Cascade Laser
[J]. Cao, Juncheng (jccao@mail.sim.ac.cn), 1600, Chinese Optical Society (37):

← 1 2 3 4 5 →