Dynamic degradation of a-InGaZnO thin-film transistors under pulsed gate voltage stress

被引:20
|
作者
Wang, Huaisheng [1 ]
Wang, Mingxiang [1 ]
Shan, Qi [1 ]
机构
[1] Soochow Univ, Dept Microelect, Suzhou 215006, Peoples R China
基金
中国国家自然科学基金;
关键词
BIAS STRESS; BEHAVIOR; TFTS;
D O I
10.1063/1.4916825
中图分类号
O59 [应用物理学];
学科分类号
摘要
Instability of amorphous InGaZnO thin-film transistors under pulsed gate voltage (V-g) stress with steep transitions was experimentally investigated. The device threshold voltage (V-th) shifts positively depending on the number of pulse repetitions of the applied V-g pulses. For steeper pulse falling time (t(f)), more degradation occurs. In addition, for different base voltages of the V-g pulses, the maximum V-th degradation occurs under the condition that V-g pulses are symmetric about the flat band voltage. Such dynamic degradation is attributed to hot-carrier induced charge injection into the gate insulator and/or trapping at the interface near the source/drain regions during the t(f) transients. (C) 2015 AIP Publishing LLC.
引用
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页数:4
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