A High-Power Linear Ultrasonic Motor Using Longitudinal Vibration Transducers With Single Foot

A high-power linear ultrasonic motor using longitudinal vibration transducers with single foot was proposed in this paper. The stator of proposed motor contains a horizontal transducer and a vertical transducer. Longitudinal vibrations are superimposed in the stator and generate an elliptical trajectory at the driving foot. The sensitivity analysis of structural parameters to the resonance frequencies of two working modes of the stator was performed using the finite element method. The resonance frequencies of two working modes were degenerated by adjusting the structural parameters. The vibration characteristics of stator were studied and discussed. A prototype motor was fabricated and measured. Typical output of the prototype is a no-load speed of 1160 mm/s and maximum thrust force of 20 N at a voltage of 200 V-rms.