Polycrystalline silicon carbide for surface micromachining

被引：16
|
作者：
Fleischman, AJ [1 ]
Roy, S [1 ]
Zorman, CA [1 ]
Mehregany, M [1 ]
Matus, LG [1 ]
机构：
[1] CASE WESTERN RESERVE UNIV,DEPT ELECT ENGN & APPL PHYS,CLEVELAND,OH 44106
来源：
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS | 1996年
关键词：
D O I：
10.1109/MEMSYS.1996.493986
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：234 / 238
页数：5
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