Polymer Piezoresistive MEMS accelerometer with Integrated ITO

被引：0
|
作者：
Saranya, B. T. [1 ]
Anjana, C. [1 ]
Tina, B. S. [1 ]
Seena, V. [1 ]
机构：
[1] Indian Inst Space Sci & Technol, Dept Avion, Dept Space, Thiruvananthapuram, Kerala, India
来源：
2017 IEEE 12TH NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE (NMDC) | 2017年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：127 / 128
页数：2
相关论文
共 50 条
  • [1] A novel piezoresistive polymer nanocomposite MEMS accelerometer
    Seena, V.
    Hari, K.
    Prajakta, S.
    Pratap, Rudra
    Rao, V. Ramgopal
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2017, 27 (01)
  • [2] An integrated MEMS piezoresistive tri-axis accelerometer
    张永平
    何常德
    于佳琪
    杜春晖
    张娟婷
    丑修建
    张文栋
    [J]. Journal of Semiconductors, 2013, 34 (10) - 86
  • [3] An integrated MEMS piezoresistive tri-axis accelerometer
    张永平
    何常德
    于佳琪
    杜春晖
    张娟婷
    丑修建
    张文栋
    [J]. Journal of Semiconductors, 2013, (10) : 80 - 86
  • [4] An integrated MEMS piezoresistive tri-axis accelerometer
    Zhang Yongping
    He Changde
    Yu Jiaqi
    Du Chunhui
    Zhang Juanting
    Chou Xiujian
    Zhang Wendong
    [J]. JOURNAL OF SEMICONDUCTORS, 2013, 34 (10)
  • [5] Piezoresistive polymer accelerometer
    Martins, L. F.
    Silva, C. S.
    Mendes, B.
    Azevedo, M.
    Pontes, A. J.
    Rocha, L. A.
    [J]. 28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014, 87 : 1477 - 1480
  • [6] Piezoresistive detector for MEMS accelerometer displacement sensing
    B.Rajesh Kumar
    D V R Koti Reddy
    [J]. Journal of Measurement Science and Instrumentation, 2012, 3 (03) : 224 - 227
  • [7] Liquid Packaging Effects On Piezoresistive MEMS Accelerometer
    Liu, Xixiang
    Jiang, Weile
    Zhao, Libo
    Jia, Chen
    Yu, Mingzhi
    Jiang, Zhuangde
    [J]. 2018 5TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS & SYSTEMS (INERTIAL 2018), 2018, : 81 - 84
  • [8] Dynamic Behaviour and Piezoresistive Analysis of a Single Mass 3-Axis Polymer MEMS Accelerometer
    Khlifi, Awatef
    Mezghani, Brahim
    Tounsi, Fares
    Ahmed, Aftab
    Pandit, Shardul
    Patkar, Rajul
    Dixit, Pradeep
    Baghini, Maryam Shojaei
    [J]. 2019 IEEE INTERNATIONAL CONFERENCE ON DESIGN & TEST OF INTEGRATED MICRO & NANO-SYSTEMS (DTS), 2019,
  • [9] Damping analysis of a quad beam MEMS piezoresistive accelerometer
    Jency, J. Grace
    Sekar, M.
    Sankar, A. Ravi
    [J]. INTERNATIONAL JOURNAL OF MODELLING AND SIMULATION, 2021, 41 (04): : 256 - 264
  • [10] Design and Simulation of Piezoresistive MEMS Accelerometer for the Detection of pathological Tremor
    Biswas, Sonali
    Gogoi, Anup Kr
    [J]. IEEE SOUTHEASTCON 2014, 2014,
12345