Characterization of Field Dependent Aberrations in Fizeau Interferometer Using Double Zernike Polynomials

被引：1
|
作者：
Chang, Hung-Sheng [1 ]
Laing, Chao-Wen [1 ]
Lin, Po-Chih [1 ]
Tsao, Ming-Sen [1 ]
机构：
[1] Natl Cent Univ, Dept Opt & Photon, Jhongli 320, Taiwan
来源：
INTERFEROMETRY XVII: TECHNIQUES AND ANALYSIS | 2014年 / 9203卷
关键词：
imaging aberrations of Fizeau interferometer; retrace error; double Zernike polynomial;
D O I：
10.1117/12.2061493
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Fizeau interferometer is widely used to test the surface deformation of the optical lens surface profile. However, in some measurement circumstances the common path condition of the Fizeau configuration does not hold. For example, the subaperture scanning interferometry of asphere or the non-null aspherical element testing has dense fringe spacing. Systematic aberrations of non-null testing are introduced into the measurement wavefront with the high wavefront slope of the returning beam. We propose to use a two-dimension scanning device to drive a test ball to different fields of the Fizeau interferometer for the the interference phase at each field. By least square fitting the measurement, we can get the double Zernike polynomial coefficients representing the field dependent aberrations in the interferometer system. According to the coefficients, the off-axis aberrations in the interferometer can be identified
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页数：8
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