Characterizations of microcantilever chemical sensors based on SOI material - art. no. 68360S

被引：0

作者：

Hu, Fangrong ^{[1
]}

Wang, Dajia ^{[1
]}

Qiu, Chuankai ^{[1
]}

Wang, Aina ^{[1
]}

Gao, Hongtao ^{[1
]}

Yao, Jun ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China

来源：

MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III | 2008年 / 6836卷

关键词：

MEMS; microcantilever; chemical sensors; SOI (Si-On-Isolator); sensitivity; FEA(finite element analysis);

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper focuses on the study of sensitivities of microcantilever chemical sensors based on SOI POLYMUMPS process. Through changing the geometry of beams and analyzing resonance frequency shift in a dynamic mode by using FEA (finite element analysis) method, the most sensitive structure, which is a triangle, is selected out from various kinds of beam designs. The relation between the sensitivity and the parameters such as length L, width W and thickness t is obtained by dynamic analyzing with the commercial software Intellisuite. This research provides the primary instruction for developing high sensitive multi-array biochips aiming at analyzing multiple parameters in parallel.

引用

页码：S8360 / S8360

页数：9

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