A microfabrication using vacuum ultraviolet light for μ-TAS applications

被引：0
|
作者：
Yamamoto, T [1 ]
Fujii, T [1 ]
机构：
[1] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo, Japan
来源：
Micro Total Analysis Systems 2004, Vol 2 | 2005年 / 297期
关键词：
VUV light; eximer UV; photoresist; XPS; electrostatic valve;
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
It is developed a novel light induced surface modification methods for PDMS based microfluidic devices using an incoherent vacuum ultraviolet (VUV) light. PDMS surface is exposed with VUV light in order to control hydrophilicity, zeta-potential, bonding strength, etc. that are all executed under atmospheric conditions. The VUV light induced chemical changes are investigated by X-ray photoelectron spectroscopy (XPS) which indicates the change from the PDMS to SiO2-like chemical composition. Additionally, as an evaluation of VUV light based fabrication, a simple electrostatic on-off valve is developed.
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页码：133 / 135
页数：3
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