Glancing incident MeV ion beams for total reflection PIXE (TPIXE) and RBS surface analysis

In a total reflection geometry at small incident angles phi (0-35 mrad), MeV proton and alpha beams were used to analyse Au and Cu layers on flat quartz substrates by detection of X-rays and backscattered protons. The reflected proton beams were detected as a function of incident angle phi. An improved model for theoretical X-ray yield calculations is developed. These calculations showed that a proton beam of 2.5 MeV will be totally reflected from a Au atomic surface layer at an incident angle smaller than 8 mrad. At these small angles the backscattered protons and alpha particles show a pattern which indicates atomic layer depth resolution.