Design of MEMS devices

被引：0
|
作者：
Zhou, Tiansheng [1 ]
机构：
[1] Univ Alberta, Ctr Excellence Integrated Nanotools, Edmonton, AB, Canada
来源：
PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING AND MECHANICS 2007, VOLS 1 AND 2 | 2007年
关键词：
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：64 / 70
页数：7
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