Optical waveguide loss induced by metal cladding

被引：3
|
作者：
Lin, J
Leven, A
Reyes, R
Chen, YK
Choa, FS
机构：
[1] Univ Maryland Baltimore Cty, Baltimore, MD 21227 USA
[2] Lucent Technol, Bell Labs, Murray Hill, NJ 07974 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2005年 / 23卷 / 04期
关键词：
D O I：
10.1116/1.1990126
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Optical waveguides with metal cladding are important for a number of applications. However; metal cladding causes undesirable optical waveguide loss. In this work, the influence of high temperature process and different metals (Ti, NiCr, Cr) on waveguide loss is examined. Cr turns out to be the best candidate metal to deliver reasonable waveguide loss for more than 30 min heat-treating temperatures up to 250 degrees C. (c) 2005 American Vacuum Society.
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页码：1361 / 1363
页数：3
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