Femtosecond Laser Direct Writing of Volume Fresnel Zone Plates

被引：2

作者：

Srisungsitthisunti, Pornsak ^{[1
]}

Ersoy, Okan K. ^{[2
]}

Xu, Xianfan ^{[1
]}

机构：

[1] Purdue Univ, Sch Mech Engn, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA

[2] Purdue Univ, Birck Nanotechnol Ctr, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA

来源：

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING XV | 2010年 / 7584卷

基金：

美国国家科学基金会;

关键词：

Femtosecond laser; Laser direct write; Diffractive optics; Fresnel zone plate; SILICA GLASS; WAVE-GUIDES; FABRICATION;

D O I：

10.1117/12.846588

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe a method of using femtosecond laser for direct writing of volume Fresnel zone plates with high diffraction efficiency. A volume zone plate consists of a number of Fresnel zone plate layers designed to focus light coherently to a single spot. We fabricated both low numerical aperture (NA) and high NA volume zone plates, resulting in a significant increase in overall diffraction efficiency. The performance of the volume zone plate is also simulated using the Hankel transform beam propagation method (Hankel BPM). The results show an excellent agreement with the scalar diffraction theory and the experimental results. The numerical method allows more comprehensive studies of the VFZP parameters to achieve higher diffraction efficiency.

引用

页数：10

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