Optimized step controller for a salient-pole micromotor

被引：3

作者：

Kucukkomurler, A ^{[1
]}

Garverick, SL ^{[1
]}

机构：

[1] Case Western Reserve Univ, Cleveland, OH 44106 USA

来源：

PROCEEDINGS OF THE IEEE 2000 NATIONAL AEROSPACE AND ELECTRONICS CONFERENCE: ENGINEERING TOMORROW | 2000年

关键词：

micromotor; MEMS control;

D O I：

10.1109/NAECON.2000.894933

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

This paper describes a controller which optimizes the step response of a silicon, micromachined, electrostatic salient-pole: micromotor. The control algorithm is based on the determination of two parameters, the critical and final times of the step response, which are obtained from a second-order differential equation of the micromotor model. The parameter values have been determined utilizing both analytical and empirical methods, which yield similar results.

引用

页码：362 / 366

页数：5

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