Optimized step controller for a salient-pole micromotor

被引：3
|
作者：
Kucukkomurler, A [1 ]
Garverick, SL [1 ]
机构：
[1] Case Western Reserve Univ, Cleveland, OH 44106 USA
来源：
PROCEEDINGS OF THE IEEE 2000 NATIONAL AEROSPACE AND ELECTRONICS CONFERENCE: ENGINEERING TOMORROW | 2000年
关键词：
micromotor; MEMS control;
D O I：
10.1109/NAECON.2000.894933
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
This paper describes a controller which optimizes the step response of a silicon, micromachined, electrostatic salient-pole: micromotor. The control algorithm is based on the determination of two parameters, the critical and final times of the step response, which are obtained from a second-order differential equation of the micromotor model. The parameter values have been determined utilizing both analytical and empirical methods, which yield similar results.
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页码：362 / 366
页数：5
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