Nondestructive Testing Technique for Defect Detection in LiNbO3 Using Infrared Thermal Imaging Camera

被引:4
|
作者
Lee, Kunyong [1 ]
Miyazaki, Hisashi [1 ]
Okamoto, Yoichi [1 ]
Morimoto, Jun [1 ]
Toda, Kohji [2 ]
机构
[1] Natl Def Acad, Dept Mat Sci & Engn, Yokosuka, Kanagawa 2398686, Japan
[2] Tokyo City Univ, Dept Mech Syst Engn, Setagaya Ku, Tokyo 1588557, Japan
关键词
LITHIUM-NIOBATE; DIFFUSIVITY;
D O I
10.1143/JJAP.49.07HB07
中图分类号
O59 [应用物理学];
学科分类号
摘要
The existence of defects in lithium niobate (LiNbO3) degrades the specific properties required of LiNbO3 as substrate material, which is a major problem inhibiting device constructions. For the purpose of providing a convenient and quick tool for use in a nondestructive testing technique for defect detection, the feasibility of using an infrared thermal imaging camera (IR camera) is examined by comparing the results of IR camera use with those of two methods, scanning laser microscopy (SLM) and light scattering tomography (LST). We have succeeded in the detection of defects in the LiNbO3 substrate by observing the thermal properties of defects in a relatively wide field of view (8 x 6mm(2)) compared with the case of using conventional microscopes. The maximum temperature difference of the defects in the LiNbO3 substrate was 0.47 K. (c) 2010 The Japan Society of Applied Physics
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页数:4
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