Parameterization Models for Traceable Characterization of Planar CPW SOL Calibration Standards

被引：0
|
作者：
Mubarak, F. [1 ]
Mascolo, V. [1 ]
Rietveld, G. [1 ]
Spirito, M. [2 ]
Daffe, K. [3 ]
Haddadi, K. [3 ]
机构：
[1] VSL, Delft, Netherlands
[2] Delft Univ Technol, Elect Res Lab, Delft, Netherlands
[3] Univ Lille 1, IEMN, Villeneuve Dascq, France
来源：
2018 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS (CPEM 2018) | 2018年
关键词：
nanostructures; co-planar waveguide; on-wafer calibration; EM simulation; VNA; measurement uncertainty; precision measurements; traceability;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Methods for traceable characterization and uncertainty evaluation of planar 1-port CPW short-open-load (SOL) devices are developed. The agreement of modelling and verification measurement results greatly supports the application of the proposed parameterization models and used FEM-based EM modelling of CPW structures for traceable characterization of planar CPW-based SOL devices in the frequency range between a few kHz up to 50 GHz.
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页数：2
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