Plasma characteristics of the single loop antenna plasma source

被引：0
|
作者：
Takagi, K
Nakagawa, Y
Tsukada, T
机构：
来源：
PROCEEDINGS OF THE ELEVENTH INTERNATIONAL SYMPOSIUM ON PLASMA PROCESSING | 1996年 / 96卷 / 12期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：116 / 125
页数：10
相关论文
共 50 条
  • [1] Characteristics of inductively coupled plasma (ICP) and helicon plasma in a single-loop antenna
    Zhang, Tianliang
    Jiang, Kaiyin
    Liu, Zhongwei
    Yang, Lizhen
    Zhang, Haibao
    Ouyang, Jiting
    Chen, Qiang
    [J]. PLASMA SCIENCE & TECHNOLOGY, 2020, 22 (08):
  • [2] Downstream plasma characteristics from a single loop antenna in a helicon processing reactor
    Carter, C
    Khachan, J
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 1999, 8 (03): : 432 - 439
  • [3] Experimental study on radiation characteristics of single-source monopole plasma antenna
    Liu, Jian
    Wang, Shiqing
    Xu, Lingfei
    [J]. Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2012, 24 (05): : 1137 - 1140
  • [4] RADIATION CHARACTERISTICS OF A CIRCULAR LOOP ANTENNA IN AN ISOTROPIC COMPRESSIBLE PLASMA
    KASAHARA, T
    ADACHI, S
    MUSHIAKE, Y
    [J]. ELECTRONICS & COMMUNICATIONS IN JAPAN, 1971, 54 (02): : 72 - &
  • [5] Characteristics and mechanism of low-field peak in argon helicon plasma of single loop antenna
    Xia, Zhangyu
    Zhang, Tianliang
    Cui, Ying
    Zheng, Bocong
    Ouyang, Jiting
    [J]. PHYSICS OF PLASMAS, 2024, 31 (08)
  • [6] A LOOP ANTENNA IN A COMPRESSIBLE PLASMA
    ADACHI, S
    KASAHARA, T
    MUSHIAKE, Y
    [J]. IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 1969, AP17 (03) : 396 - &
  • [7] Effect of the magnetic field strength on the argon plasma characteristics of a helicon plasma source with a two-turn flat-loop antenna
    Seto, Takumi
    Ezumi, Naomichi
    Miyauchi, Reina
    Okamoto, Takuma
    Takahashi, Satoshi
    Takanashi, Kosuke
    Kouno, Keishi
    Kawahara, Hiroto
    Hirata, Mafumi
    Kohagura, Junko
    Togo, Satoshi
    Sakamoto, Mizuki
    Furukawa, Takeru
    Shinohara, Shunjiro
    [J]. JOURNAL OF PLASMA PHYSICS, 2024, 90 (04)
  • [8] The Influence of a Magnetized Plasma Column on the Radiation Characteristics of a Strip Loop Antenna
    Kudrin, Alexander V.
    Zaitseva, Anna S.
    Spagnolo, Bernardo
    Zaboronkova, Tatyana M.
    [J]. 2014 8TH EUROPEAN CONFERENCE ON ANTENNAS AND PROPAGATION (EUCAP), 2014, : 2195 - +
  • [9] HELICON WAVE PLASMA REACTOR EMPLOYING SINGLE-LOOP ANTENNA
    JIWARI, N
    FUKASAWA, T
    KAWAKAMI, H
    SHINDO, H
    HORIIKE, Y
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (04): : 1322 - 1327
  • [10] Characteristics of an inductively coupled plasma source using a parallel resonance antenna
    Lee, DS
    Lee, YK
    Chang, HY
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2004, 13 (04): : 701 - 706
12345