Characteristics and mechanism of low-field peak in argon helicon plasma of single loop antenna

被引:0
|
作者
Xia, Zhangyu [1 ]
Zhang, Tianliang [1 ]
Cui, Ying [1 ]
Zheng, Bocong [1 ]
Ouyang, Jiting [1 ]
机构
[1] Beijing Inst Technol, Sch Phys, Beijing 100081, Peoples R China
基金
中国国家自然科学基金;
关键词
DENSITY PEAK; GENERALIZED THEORY; MODE TRANSITIONS; MAGNETIC-FIELD; WAVES; EXCITATION; ABSORPTION; JUMPS;
D O I
10.1063/5.0213521
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Low magnetic field density peak (LFP) is a typical nonlinear phenomenon in helicon wave discharge, which is characterized by the nonlinear increase in electron density with the magnetic field in lower magnetic fields. In this paper, the characteristics and generation mechanism of LFPs of argon helicon wave plasma excited by m = 0 single-loop antenna are studied by experiment and numerical simulation. Experimental results show that plasma density shows two peaks at increasing magnetic field in the range of 0-100 G. The first peak appears around 10 G, and the second one appears between 30 and 50 G. The peak density is related to gas pressure, radio frequency power, and tube dimension. From B-dot measurement, there exists obvious helicon wave structure in plasma at field strength around the LFP, with component of standing wave. Theoretical analysis demonstrated that the first density peak occurs on the demarcation line in density-magnetic field map where the H-wave limited by radial boundary condition begins to propagate, while the second peak is due to the fact that the axial wavenumber of H-wave decreases gradually with the increased magnetic field and the heating effect by standing wave resonance coupling is weakened above a critical magnetic field, leading to a sudden decrease in plasma density. Simulation by HELIC code shows that the change of radial distribution of power deposition reflects the conversion of heating mechanism from single TG-wave mode to H-TG wave coupled mode heating in low magnetic fields. The axial wavenumber with the maximum absorbed power decreases with the increased magnetic field, corresponding to the change of wave structure. (C) 2024 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution-NonCommercial-NoDerivs 4.0 International (CC BY-NC-ND) license (https://creativecommons.org/licenses/by-nc-nd/4.0/)
引用
收藏
页数:8
相关论文
共 50 条
  • [1] The low-field density peak in helicon discharges
    Chen, FF
    [J]. PHYSICS OF PLASMAS, 2003, 10 (06) : 2586 - 2592
  • [2] On the mechanism of density peak at low magnetic field in argon helicon plasmas
    Zhu, Wanying
    Cui, Ruilin
    He, Feng
    Zhang, Tianliang
    Ouyang, Jiting
    [J]. PHYSICS OF PLASMAS, 2022, 29 (09)
  • [3] Characteristics of inductively coupled plasma (ICP) and helicon plasma in a single-loop antenna
    Zhang, Tianliang
    Jiang, Kaiyin
    Liu, Zhongwei
    Yang, Lizhen
    Zhang, Haibao
    Ouyang, Jiting
    Chen, Qiang
    [J]. PLASMA SCIENCE & TECHNOLOGY, 2020, 22 (08):
  • [4] Downstream plasma characteristics from a single loop antenna in a helicon processing reactor
    Carter, C
    Khachan, J
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 1999, 8 (03): : 432 - 439
  • [5] Effect of the magnetic field strength on the argon plasma characteristics of a helicon plasma source with a two-turn flat-loop antenna
    Seto, Takumi
    Ezumi, Naomichi
    Miyauchi, Reina
    Okamoto, Takuma
    Takahashi, Satoshi
    Takanashi, Kosuke
    Kouno, Keishi
    Kawahara, Hiroto
    Hirata, Mafumi
    Kohagura, Junko
    Togo, Satoshi
    Sakamoto, Mizuki
    Furukawa, Takeru
    Shinohara, Shunjiro
    [J]. JOURNAL OF PLASMA PHYSICS, 2024, 90 (04)
  • [6] Low-field helicon discharges
    Chen, FF
    Jiang, X
    Evans, JD
    Tynan, G
    Arnush, D
    [J]. PLASMA PHYSICS AND CONTROLLED FUSION, 1997, 39 (5A) : 411 - 420
  • [7] HELICON WAVE PLASMA REACTOR EMPLOYING SINGLE-LOOP ANTENNA
    JIWARI, N
    FUKASAWA, T
    KAWAKAMI, H
    SHINDO, H
    HORIIKE, Y
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (04): : 1322 - 1327
  • [8] Plasma characteristics of the single loop antenna plasma source
    Takagi, K
    Nakagawa, Y
    Tsukada, T
    [J]. PROCEEDINGS OF THE ELEVENTH INTERNATIONAL SYMPOSIUM ON PLASMA PROCESSING, 1996, 96 (12): : 116 - 125
  • [9] NONLOCAL EFFECTS IN LOW-FIELD HELICON PROPAGATION IN PBTE
    WALPOLE, JN
    MCWHORTER, AL
    [J]. PHYSICAL REVIEW, 1967, 158 (03): : 708 - +
  • [10] Effect of magnetic field on double layer in argon helicon plasma
    Yang, Kaiyi
    Cui, Ruilin
    Zhu, Wanying
    Wu, Zhiwen
    Ouyang, Jiting
    [J]. HIGH VOLTAGE, 2021, 6 (02) : 358 - 365