Surface roughness measurement by digital holography

被引：1
|
作者：
Li Yan [1 ]
Wang Dayong [1 ]
Zhao Jie [1 ]
Wang Guangjun [1 ]
Wang Yunxin [1 ]
机构：
[1] Beijing Univ Technol, Coll Appl Sci, Beijing 100124, Peoples R China
来源：
5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT | 2010年 / 7656卷
关键词：
Digital holography; lensless Fourier transform; surface roughness measurement; standard roughness sample plates; INTERFEROMETER;
D O I：
10.1117/12.865743
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Surface roughness is crucial guideline to the surface quantity of work piece. This paper demonstrates a simple approach for measurement of surface roughness by using digital holography imaging method based on reflection off-axis lensless Fourier transform (LFT) holography. The surface profiles of the standard roughness sample plates which have the different arithmetic average height values are used as the measurement sample. Comparing the arithmetical average height values of the roughness sample plates obtained from the experiment with the given parameters, the results are in good agreement. It has shown that the method is reasonable and efficient.
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收藏
页数：8
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