Fabrication of micromachined TiNi based microgripper with compliant structure

被引：7
|
作者：
Fu, YQ [1 ]
Bu, HJ [1 ]
机构：
[1] Nanyang Technol Univ, Sch MPE, Singapore 639798, Singapore
来源：
SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2 | 2003年 / 5116卷
关键词：
sputter-deposition; TiNi thin film; shape memory; Martensite transformation;
D O I：
10.1117/12.498184
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
One of the problems faced in the development of micro-gripper is that the actuation displacement or force is too small. In this study, it is aimed to solve this problem with application of shape memory and compliant mechanisms. TiNi film based micro-gripper with compliant structure was design, simulated and fabricated. Some important issues regarding to the preparation of high performance shape memory TiNi films using sputtering methods were discussed.
引用
收藏
页码：38 / 47
页数：10
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