Development of an Energy-Saving Controller for Sub Apparatus

An enormous energy has been consumed in a semiconductor manufacturing factory. The energy consumption ratio for the use of manufacturing apparatus is approximately 60% in a semiconductor manufacturing factory, and the cost of energy is increasing in recent years. Therefore, we develop an energy saving controller for saving the energy of sub apparatus. We introduce the controller for dry pump and gas detoxifying apparatus during wafer transfer steps. We succeed in reducing energy consumption approximately 17 percent per manufacturing apparatus. The energy saving controller has the feature of rationality for energy saving operation and usability for every sub apparatus.