Polymeric Sacrificial layers for the control of microstructure and porosity of oxide thin films deposited by plasma-enhanced chemical vapor deposition

被引：7
|
作者：
Barranco, A [1 ]
Cotrino, J
Yubero, F
González-Elipe, AR
机构：
[1] Univ Seville, CSIC, Inst Ciencia Mat Sevilla, C Amer Vespucio S-N, Seville 41092, Spain
[2] Univ Seville, CSIC, Dept Quim Inorgan, Seville 41092, Spain
[3] Univ Seville, Fac Fis, Dept Fis Atom Mol & Nucl, Seville, Spain
来源：
CHEMISTRY OF MATERIALS | 2003年 / 15卷 / 16期
关键词：
Polymeric sacrificial layers;
D O I：
10.1021/cm034023z
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：3041 / 3043
页数：3
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