Design of Fiber-optic MEMS Acoustic Sensor System for Gunship Acoustic Detecting

被引：0
|
作者：
Jiang Bingli [1 ]
Yang Kuntao [1 ]
Wang Jiangan [2 ]
Wu Yaming [3 ]
机构：
[1] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Sch Optoelect Sci & Engn, Wuhan 430033, Peoples R China
[2] Naval Univ Engn, Inst Elect Engn, Wuhan 430033, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
来源：
RECENT TRENDS IN MATERIALS AND MECHANICAL ENGINEERING MATERIALS, MECHATRONICS AND AUTOMATION, PTS 1-3 | 2011年 / 55-57卷
关键词：
fiber-optical sensor; acoustic sensor; EFPI; MEMS; gunship acoustic detecting;
D O I：
10.4028/www.scientific.net/AMM.55-57.719
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
In this paper a new fiber-optic Microelectromechanical System (MEMS) acoustic sensor system for gunship acoustic detecting is developed. A novel MEMS acoustic sensor used in the system is designed. The sensor is based on extrinsic Fabry-Perot (FP) interferometer coupled to an external membrane for modulating the FP cavity length and a light-emitting diode (LED) as light source. The relation expression between displacement of cavity length and light intensity is deduced. Theoretical signal of the sensor is simulated.
引用
收藏
页码：719 / +
页数：2
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