Promoting sustainable economic development from the perspective of energy technology is crucial, given limited energy resources and severe environmental pollution. Based on the panel data of China's provinces from 2000 to 2017, we empirically explore the complex relation among energy technology innovation, regional economic growth, and total factor ecological efficiency. We innovatively introduce ecological footprint as one of the input indicators of total factor ecological efficiency measured using slack-based measure-data envelopment analysis, thereby comprehensively quantifying sustainable economic development. Moreover, we adopt spatial econometric and threshold regression models to empirically assess the relation between energy technology innovation and total factor ecological efficiency. We infer the following conclusions. First, both China's provincial ecological efficiency and energy technology innovation possess significant spatial positive correlation, manifesting a spatial geographical distribution agglomerated by similar characteristics. Second, the regional energy technology innovation has a remarkable spatial effect on ecological efficiency, displaying a U-shaped trend. Compared with the direct effect, the spatial spillover effect is more intense, along with a much stronger long-term influence. Third, under the regulation of regional economic growth, two inflection points exist in the effect of energy technology innovation on ecological efficiency. Energy technology innovation is not conducive to total factor ecological efficiency under low regional economic growth. No significant relation exists between the two core variables under medium regional economic growth. Furthermore, energy technology innovation positively influences total factor ecological efficiency only when regional economic growth reaches a certain peak.