共 30 条
- [12] Model etch profiles for ion energy distribution functions in an inductively coupled plasma reactor JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (05): : 2061 - 2069
- [14] Numerical investigation of ion-energy-distribution functions in single and dual frequency capacitively coupled plasma reactors PHYSICAL REVIEW E, 2004, 69 (02): : 026406 - 1
- [18] Two-dimensional ion velocity distribution functions in electron cyclotron resonance plasma under a divergent magnetic field 1600, American Inst of Physics, Woodbury, NY, USA (74):
- [19] Effect of ion energy and incident angle on the modification of a porous low dielectric-constant material in an O2 plasma ashing process SURFACE & COATINGS TECHNOLOGY, 2003, 174 : 835 - 838
- [20] ION ENERGY-DISTRIBUTION FUNCTIONS IN A MULTIPOLE CONFINED ARGON PLASMA DIFFUSING FROM A 13.56-MHZ HELICON SOURCE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (01): : 157 - 163