Interface study of a high-performance W/B4C X-ray mirror

被引:17
|
作者
Siffalovic, Peter [1 ]
Jergel, Matej [1 ]
Chitu, Livia [1 ]
Majkova, Eva [1 ]
Matko, Igor [1 ]
Luby, Stefan [1 ]
Timmann, Andreas [2 ]
Roth, Stephan Volker [2 ]
Keckes, Jozef [3 ]
Maier, Guenter Alois [4 ]
Hembd, Alexandra [5 ]
Hertlein, Frank [5 ]
Wiesmann, Joerg [5 ]
机构
[1] Slovak Acad Sci, Inst Phys, Bratislava, Slovakia
[2] HASYLAB DESY, D-22603 Hamburg, Germany
[3] Austrian Acad Sci, Erich Schmid Inst Mat Sci, A-8700 Leoben, Austria
[4] Mat Ctr Leoben Forsch GmbH, A-8700 Leoben, Austria
[5] Incoatec GmbH, D-21502 Geesthacht, Germany
关键词
grazing-incidence small-angle X-ray scattering (GISAXS); X-ray multilayer mirrors; fractal interfaces; thermal stability; oxidation behaviour; SCATTERING; ROUGHNESS; REFLECTION; GROWTH; MULTILAYERS; NEUTRONS; SURFACES; BRAGG; W/C;
D O I
10.1107/S0021889810036782
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A high-performance W/B4C multilayer mirror with 80 periods of nominally 1.37 nm was measured by grazing-incidence small-angle X ray scattering (GISAXS) in order to analyse the lateral and vertical correlations of the interface roughness within the framework of a scaling concept of multilayer growth. A dynamic growth exponent z = 2.19 (7) was derived, which is close to the value predicted by the Edwards-Wilkinson growth model. The effective number of correlated periods indicates a partial replication of the low interface roughness frequencies. A simulation of the GISAXS pattern based on the Born approximation suggests a zero Hurst fractal parameter H and a logarithmic type of autocorrelation function. The as-deposited mirror layers are amorphous and exhibit excellent thermal stability up to 1248 K in a 120 s rapid thermal vacuum annealing process. At higher temperatures, the B4C layers decompose and poorly developed crystallites of a boron-rich W-B hexagonal phase are formed, and yet multilayer collapse is not complete even at 1273 K. Ozone treatment for 3000 s in a reactor with an ozone concentration of 150 mg m-3 results in the formation of an oxidized near-surface region of a thickness approaching similar to 10% of the total multilayer thickness, with a tendency to saturation.
引用
收藏
页码:1431 / 1439
页数:9
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