Analysis of displacements of a polymeric microgripper

被引：0
|
作者：
Voicu, R. [1 ]
Tibeica, C. [1 ]
Eftime, L. [1 ]
Muller, R. [1 ]
机构：
[1] IMT Bucharest, Natl Inst R&D Microtechnol, Bucharest, Romania
来源：
CAS 2007 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS | 2007年
关键词：
microgripper; FEM analysis; SU-8; structure; electro-thermal actuator;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A polymeric, electro-thermally actuated microgripper has been designed. Preliminary experimental tests were carried out. Analyses of different displacements of the microgripper were performed. We present a study of different geometries of the metalic layers of the microgripper structure in order to optimise the model structure, by reducing the displacements (vertical and horizontal) which can make the structure instable or difficult to operate with her. The analyses of the displacements were studied using finite-element modelling and performing electrothermo-mechanical simulations.
引用
收藏
页码：567 / 570
页数：4
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