The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography

被引：11

作者：

Wu, Jun ^{[1
]}

Geng, Zhaoxin ^{[2
]}

Xie, Yiyang ^{[1
]}

Fan, Zhiyuan ^{[3
]}

Su, Yue ^{[3
]}

Xu, Chen ^{[1
]}

Chen, Hongda ^{[3
]}

机构：

[1] Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

[2] Minzu Univ China, Sch Informat Engn, Beijing 10083, Peoples R China

[3] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China

来源：

NANOMATERIALS | 2019年 / 9卷 / 01期

基金：

国家重点研发计划; 北京市自然科学基金; 中国国家自然科学基金;

关键词：

laser interference lithograph; PDMS; periodic nanostructures;

D O I：

10.3390/nano9010073

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We report a method for fabricating periodic nanostructures on the surface of polydimethylsiloxane (PDMS) using laser interference lithography. The wave-front splitting method was used for the system, as the period and duty cycle can be easily controlled. Indium tin oxide (ITO) glass reveals favorable characteristics for controlling the standing waves distributed in the vertical direction, and was selected as the rigid substrate for the curing of the PDMS prepolymer, photoresist spin coating, and exposure processes. Periodic nanostructures such as gratings, dot, and hole arrays were prepared. This efficient way of fabricating large area periodic nanoscale patterns will be useful for surface plasmonic resonance and wearable electronics.

引用

页数：8

共 50 条

[21] Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation
Wang Zihan
Wang Baoxu
Masaru, Kamano
Xu Weiwei
LASER & OPTOELECTRONICS PROGRESS, 2019, 56 (16)
[22] Fabrication of gold nanostructures through pulsed laser interference patterning
Yuan, Dajun
Acharya, Ranadip
Das, Suman
APPLIED PHYSICS LETTERS, 2013, 103 (22)
[23] Interference lithography for nanostructure fabrication
Zhurminsky, Igor
Schnieper, Marc
Ferrini, Rolando
Fricke, Soeren
HOLOGRAPHY: ADVANCES AND MODERN TRENDS VI, 2019, 11030
[24] Photoresistless fabrication of periodic patterns on GaAs by laser interference photochemical lithography
Zhao, Dongfang
Gao, Naikun
Jia, Ran
Zhang, Ling
Yan, Weishan
Liu, Duo
RSC ADVANCES, 2016, 6 (50): : 44057 - 44061
[25] Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology
Shimizu Y.
Nanomanufacturing and Metrology, 2021, 4 (01) : 3 - 27
[26] Rapid Fabrication of Biocompatible Hydrogels Microdevices Using Laser Interference Lithography
Lasagni, Andres
Yuan, Dajun
Shao, Peng
Das, Suman
BIOENGINEERED AND BIOINSPIRED SYSTEMS IV, 2009, 7365
[27] The fabrication of hydrophilic structure on lens via direct laser interference lithography
Mao, Aofei
Li, Yongliang
Wang, Guanhua
Li, Peiyao
OPTIK, 2017, 149 : 90 - 94
[28] Fabrication of Fe Nanodot Using AAO Prepatterned by Laser Interference Lithography
Hwang, H. M.
Kang, J. H.
Lee, S. G.
Lee, J.
JOURNAL OF THE KOREAN MAGNETICS SOCIETY, 2007, 17 (03): : 137 - 140
[29] Laser Interference Lithography-A Method for the Fabrication of Controlled Periodic Structures
Liu, Ri
Cao, Liang
Liu, Dongdong
Wang, Lu
Saeed, Sadaf
Wang, Zuobin
NANOMATERIALS, 2023, 13 (12)
[30] Fabrication of suspended bridge type resonator using laser interference lithography
Hwang, Boyeon
Song, In-Sang
Park, Jung Ho
Shin, Jea-Shik
Rieh, Jae-Sung
Hwang, Sung-Woo
Ju, Byeong-kwon
2012 7TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2012, : 524 - 527

← 1 2 3 4 5 →